Vacuum Load Lock Door
Pin On Mdc Vacuum Products Division
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Quick access doors provide convenient and fast manual loading of samples in and out of vacuum chambers.
Vacuum load lock door. The chambers are equipped with uhv connecting flanges and additional ports for future versatility. Viewport fitted doors are constructed with corning type 7056 glass fused to a kovar nickel iron transition sleeve. Doors are hinged and fitted with a swingaway hand knob locking mechanism. All access doors are supplied with viton elastomer seals suitable for high vacuum service.
1x10 10 torr temperature range 20ºc to 150ºc magnets must be removed for 150ºc rating. Ln 2 cooling or heating samples up to 600 c. 022 transfer valve monovat direct for load lock and process chamber isolation in semiconductor production systems for 200 300 and 450 mm wafers. 30ºc maximum when attached.
Precision hinged access doors seal with a fluorocarbon o ring. Description quick access doors provide convenient and fast manual loading of samples in and out of vacuum chambers. Fast entry access load lock doors hardware replacement parts contact us to contact someone directly please click here or call 1 412 387 9200 to get in contact with your dedicated sales team. They are designed for base pressures between 1x10 7 mbar and 1x10 9 mbar.
For load lock and process chamber isolation in semiconductor production systems for 200 and 300 mm wafers. Mdc vacuum products llc is an iso 9001 2015 certified company. Bolt kits for quick access doors with clearance holes. Doors are hinged and fitted with a swingaway hand knob locking mechanism.
See quick access doors section vacuum range. Enable quick and convenient access into vacuum vessels such as process chambers and load locks. For complete instructions and parts needed to fix your door locks and other related vacuum problems go here. Viewport fitted doors are constructed with corning type 7056 glass fused to a kovar nickel iron transition sleeve.
For conversion tables click here. A range of options exist for e g. Offered in a wide range of uhv flange sizes with or without viewport glass.
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